Products for semiconductor and
FPD manufacturing processes
TEAC's load cells are used in the semiconductor manufacturing process,
from crystal growth to reliability inspections.
Ingot pulling
A polycrystal is melted in a quartz crucible and pulled while rotating the seed crystal rod to
make a single crystal ingot (ingot pulling by the CZ method).
Load cell for pulling machines
TT-XNⅡ / TT-XNⅡ(G)
- Single crystal growth load cell
- Two‐stage type that can measure minute loads
- Anti‐noise, overload protection function
Load cell for pulling machines
TT-XNS / TT-XNS(G)
- Single crystal growth load cell
- Overload protection function
Tension/Compression load cell
TU-PGRH-G
- For pulling large diameter silicon wafers
- Ultra‐precision
Tension/Compression load cell
TU-PGRS-G
- For pulling large diameter silicon wafers
- High precision
Wafer polishing
The surface of the wafer is lapped and polished.
Compression Load Cell
TC-NSRSP(T)-G3
- Small, High responsivity
- Robot cable
- TEDS
Tension/Compression load cell
TU-GR-G
- Thin, shear, and center hole type
- Anti‐eccentricity and fatigue resistance
Digital Transducer Indicator
TD-700T
- Standard type
- Various hold functions
- CC-Link
Load Cell Signal Conditioner
TD-SC1
- Embedded type
- Rich network (EtherNet/IP, CC‐Link, RS‐485)
- Setting and monitoring by PC
Wafer planarization (CMP)
The surface of the wafer is lapped and polished to flatten unevenness.
Compression Load Cell
TC-NSRSP(T)-G3
- Adopts a robot cable resistant to bending
- The adoption of sputtering gauge realizes high cost‐effectiveness.
Tension/Compression load cell
TU-PGRS-G
- High precision, High stability
- Sealed structure
Digital Transducer Indicator
TD-700T
- Standard type
- Various hold functions
- CC-Link
Load Cell Signal Conditioner
TD-SC1
- Embedded type
- Rich network (EtherNet/IP, CC‐Link, RS‐485)
- Setting and monitoring by PC
Wafer inspection (prober)
Wafers are tested chip by chip.
Determines good/defective items and marks defective items.
Compression Load Cell
TC-LPR(T)-G6
- Thin type
- Detachable load button
Compression Load Cell
TC-USR(T)-G3
- High precision
- 500% overload resistant structure
Tension/Compression load cell
TU-NR-C-G
- Thin airtight structure
- Shear beam
Digital Transducer Indicator
TD-700T
- Standard type
- Various hold functions
- CC-Link
TEDS standard‐compliant,
Color graphic Digital indicator for press/press‐fitting
TD-9000T
- Multifunctional type
- Supports 2 inputs of load cell + displacement
- EtherNet/IP™
Load Cell Signal Conditioner
TD-SC1
- Embedded type
- Rich network (EtherNet/IP, CC‐Link, RS‐485)
- Setting and monitoring by PC
Wire bonding
Connects the lead frame and the chip with a gold wire of about 25 μm, for example.
Compression Load Cell
TC-SR(T)-G3
- Easy to install on the existing facilities / systems
Compression Load Cell
TC-USR(T)-G3
- Adopts a robot cable resistant to bending
- 500% overload resistant structure
- High precision
Compression Load Cell
TC-MFSR(T)-G
- Flat load point / Surface contact
Compression Load Cell
TC-NSRSP(T)-G3
- Adopts a robot cable resistant to bending
- The adoption of sputtering gauge realizes high cost‐effectiveness.
Digital Transducer Indicator
TD-700T
- Standard type
- Various hold functions
- CC-Link
TEDS standard‐compliant,
Color graphic Digital indicator for press/press‐fitting
TD-9000T
- Multifunctional type
- Supports 2 inputs of load cell + displacement
- EtherNet/IP™
Load Cell Signal Conditioner
TD-SC1
- Embedded type
- Rich network (EtherNet/IP, CC‐Link, RS‐485)
- Setting and monitoring by PC
Trim & Form
Cuts the frame and shapes the lead.
Compression Load Cell
TC-USR(T)-G3
- Adopts a robot cable resistant to bending
- 500% overload resistant structure
- High precision
Compression Load Cell
TC-NSRSP(T)-G3
- Adopts a robot cable resistant to bending
- The adoption of sputtering gauge realizes high cost‐effectiveness.
Digital Transducer Indicator
TD-700T
- Standard type
- Various hold functions
- CC-Link
TEDS standard‐compliant,
Color graphic Digital indicator for press/press‐fitting
TD-9000T
- Multifunctional type
- Supports 2 inputs of load cell + displacement
- EtherNet/IP™
Load Cell Signal Conditioner
TD-SC1
- Embedded type
- Rich network (EtherNet/IP, CC‐Link, RS‐485)
- Setting and monitoring by PC
Liquid medicine management
Manages the remaining amount of liquid and gas cylinders.
Low‐profile Load Cell Floor Scale
TL-LF
- Small (80mm)
Low‐profile Load Cell Floor Scale
TL-PM
- Thin type
- 120‐210mm
Low‐profile Load Cell Floor Scale
TL-PS
- Standard type
- Standard type 120‐600mm
Low‐profile Load Cell Floor Scale
TL-PW
- Simple waterproof type (equivalent to IP53)
- 220‐600mm
Digital Transducer Indicator
TD-700T
- Standard type
- Various hold functions
- CC-Link
Digital Indicator
TD-260T
- Indicator value display
- Various hold functions, contact displays
Load Cell Signal Conditioner
TD-SC1
- Embedded type
- Rich network (EtherNet/IP, CC‐Link, RS‐485)
- Setting and monitoring by PC
Assembling (pasting together)
Each layer of liquid crystal is pasted together.
Compression Load Cell
TC-USR(T)-G3
- Ultra‐low capacity, with stopper, screw hole
- Φ17〜30
Compression Load Cell
TC-XR(T)-G6
- Ideal for thin press molding equipment
- Supports from 200kN to 300kN
Digital Transducer Indicator
TD-700T
- Standard type
- Various hold functions
- CC-Link
Digital Indicator
TD-260T
- Indicator value display
- Various hold functions, contact displays
Load Cell Signal Conditioner
TD-SC1
- Embedded type
- Rich network (EtherNet/IP, CC‐Link, RS‐485)
- Setting and monitoring by PC
Material weight management
Manages hopper weight.
Digital Transducer Indicator
TD-700T
- Indicator value / Bar meter display
- Standard equipped with Various hold functions and Contact display
- CC‐Link
For spot welding force measurement
Used to optimally control the applied pressure during spot welding.
Load cell for spot welding pressure control
TC-WLD(T)☐☐kN-G
- Small size and light weight
- For pressure measurement of spot welding
Portable Digital Indicator
TD-01 Portable
- Handy, Dry Cell Battery/USB powered
- Indicator value / Graph display
Chip mounter
Used for load control of chip mounters for placing electronic parts on printed circuit boards.
Compression Load Cell
TC-SR(T)☐☐N/KN-G3
- Mounting method: Glue, Housing
- Small size and light weight
Compression Load Cell
TC-USR(T)☐☐N/KN-G3
- Mounting method: Glue, Screw hole
- Ultra‐low capacity
- Resistant to temperature effects
Compression Load Cell
TC-NSRSP(T)☐☐N-G3
- Mounting method: Screw hole
- Unique structure
- High precision, high response, high stability
Compression Load Cell
TC-MFSR(T)☐☐N-G
- Mounting method: Bonding, Housing
- Flat load point
Digital Transducer Indicator
TD-700T
- Indicator value / Bar meter display
- Standard equipped with Various hold functions and Contact display
- CC-Link
Digital Indicator
TD-260T
- Indicator value display
- Various hold functions, contact displays
Load Cell Signal Conditioner
TD-SC1
- Embedded type
- Rich network (EtherNet/IP, CC‐Link, RS‐485)
- Setting and monitoring by PC
Machine check at production site
Checks the load cells built into the equipment.
Portable Digital Indicator
TD-01 Portable
- Handy (with dedicated case)
- Color liquid crystal, Indicator value / Graph display
- Dry Cell Battery / USB powered
